超清版 GB/T 44221-2024 光学系统波前像差的测定 夏克-哈特曼光电测量法

ICS 17.180.99
CCS L 50
GB/T 44221—2024
光学系统波前像差的测定
夏克⁃哈特曼光电测量法
Determination of wavefront aberration in optical systems—
Electro⁃optical Shack⁃Hartmann method
2024⁃07⁃24 发布2025⁃02⁃01 实施
国家市场监督管理总局
国家标准化管理委员会发 布

目　　次
前言··························································································································Ⅲ
1　范围·······················································································································1
2　规范性引用文件········································································································1
3　术语和定义··············································································································1
4　测量原理及方法········································································································2
4.1　测量原理···········································································································2
4.2　光学系统波前像差测量方法···················································································2
4.3　光学零件面形偏差的测量······················································································3
5　测量条件·················································································································4
5.1　测量环境···········································································································4
5.2　样品·················································································································4
6　设备及装置··············································································································4
6.1　测量仪··············································································································4
6.2　辅助镜头···········································································································5
7　测量步骤·················································································································5
7.1　测量前准备········································································································5
7.2　波前重构方法的选择····························································································6
7.3　光路对准···········································································································6
7.4　测量与数据的判定·······························································································6
8　测量数据处理···········································································································6
9　测量报告·················································································································7
附录A（资料性）　波前复原方法·······················································································8
附录B（资料性）　Zernike 多项式序列·····································