超清版 GB/T 20510-2024 氧化铟锡靶材

ICS 77.150.60
CCS H 62
中华人民共和国国家标准
GB/T 20510—2024
氧化铟锡靶材
Indium-tin oxide target
代替 GB/T 20510—2017
2024-09-29 发布2025-04-01 实施
国家市场监督管理总局
国家标准化管理委员会发 布

目　　次
前言 ····································································································· Ⅲ
1 范围 ·································································································· 1
2 规范性引用文件 ······················································································ 1
3 术语和定义 ··························································································· 1
4 分类 ·································································································· 2
5 技术要求 ······························································································ 2
5.1 化学成分 ························································································· 2
5.2 物理性能 ························································································· 3
5.3 尺寸规格及其偏差 ··············································································· 3
5.4 外观质量 ························································································· 3
5.5 内部质量 ························································································· 3
6 试验方法 ······························································································ 3
6.1 化学成分 ························································································· 3
6.2 物理性能 ························································································· 3
6.3 尺寸规格及其偏差 ··············································································· 4
6.4 外观质量 ························································································· 4
6.5 内部质量 ························································································· 4
7 检验规则 ······························································································ 4
7.1 检查和验收 ······················································································ 4
7.2 组批 ······························································································ 4
7.3 检验项目 ························································································· 4
7.4 取样和制样 ······················································································ 5
7.5 检验结果的判定 ················································································· 6
8 标志、包装、运输、贮存及随行文件 ································································ 6
8.1 标志 ······························································································ 6
8.2 包装 ······························································································ 6
8.3 运输与贮存 ··········