超清版 GB/T 44334-2024 埋层硅外延片

ICS 29.045
CCS H 82
中华人民共和国国家标准
GB/T 44334—2024
埋 层 硅 外 延 片
Silicon epitaxial wafers with buried layers

2024-08-23 发布2025-03-01 实施
国家市场监督管理总局
国家标准化管理委员会发 布

目　　次
前言 ····································································································· Ⅲ
1 范围 ·································································································· 1
2 规范性引用文件 ······················································································ 1
3 术语和定义 ··························································································· 1
4 产品分类 ······························································································ 2
5 技术要求 ······························································································ 2
5.1 衬底材料 ························································································· 2
5.2 外延层 ··························································································· 2
5.3 几何参数 ························································································· 4
5.4 表面金属 ························································································· 4
5.5 表面质量 ························································································· 4
5.6 边缘 ······························································································ 5
5.7 其他 ······························································································ 5
6 试验方法 ······························································································ 5
7 检验规则 ······························································································ 6
7.1 检查与验收 ······················································································ 6
7.2 组批 ······························································································ 6
7.3 检验项目 ························································································· 6
7.4 取样 ······························································································ 6
7.5 检验结果的判定 ················································································· 6
8 标志、包装、运输、贮存和随行文件 ································································ 7
8.1 标志和包装 ······················································································ 7
8.2 运输和贮存 ······················································································ 8
8.3 随行文件 ························································································· 8
9 订货单内容 ··························································································· 8

前　　言
本文件按照GB/T 1.1—2020《标准化工作导则　第1 部分：标准化文件的结构和起草规则》的规
定起草。
请注意本文件的某些内容可能涉及专利。本文件的发布机构不承